JPS51100753A - - Google Patents
Info
- Publication number
- JPS51100753A JPS51100753A JP50024975A JP2497575A JPS51100753A JP S51100753 A JPS51100753 A JP S51100753A JP 50024975 A JP50024975 A JP 50024975A JP 2497575 A JP2497575 A JP 2497575A JP S51100753 A JPS51100753 A JP S51100753A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2497575A JPS5335467B2 (en]) | 1975-03-03 | 1975-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2497575A JPS5335467B2 (en]) | 1975-03-03 | 1975-03-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51100753A true JPS51100753A (en]) | 1976-09-06 |
| JPS5335467B2 JPS5335467B2 (en]) | 1978-09-27 |
Family
ID=12152964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2497575A Expired JPS5335467B2 (en]) | 1975-03-03 | 1975-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5335467B2 (en]) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5560816A (en) * | 1978-10-31 | 1980-05-08 | Kazuhiro Toida | Automatic reading method for data at indexed position of instrument |
| JPS5773037U (en]) * | 1980-10-16 | 1982-05-06 | ||
| JPS5833104A (ja) * | 1981-08-21 | 1983-02-26 | Toshiba Corp | 組立精度測定方法 |
| JPS58213205A (ja) * | 1983-05-16 | 1983-12-12 | Hitachi Ltd | 微小寸法測定装置 |
-
1975
- 1975-03-03 JP JP2497575A patent/JPS5335467B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5560816A (en) * | 1978-10-31 | 1980-05-08 | Kazuhiro Toida | Automatic reading method for data at indexed position of instrument |
| JPS5773037U (en]) * | 1980-10-16 | 1982-05-06 | ||
| JPS5833104A (ja) * | 1981-08-21 | 1983-02-26 | Toshiba Corp | 組立精度測定方法 |
| JPS58213205A (ja) * | 1983-05-16 | 1983-12-12 | Hitachi Ltd | 微小寸法測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5335467B2 (en]) | 1978-09-27 |